Resolution 12 µm
Dimensions 997 × 1756 × 1753 mm (W × D × H)
Field of View (FOV) 58 × 58 mm; 40 × 40 mm (at 8 µm resolution)
Z-axis Measurement up to 5 mm
Inspection Speed up to 80 cm²/s
Maximum PCB Size 508 × 508 mm
Clearance 50 mm (top), 50 mm (bottom)